Composition	Y2O3(10 mol%)-ZrO2(90 mol%)
Crystal system	Cubic
Crystal structure	CaF2
Lattice constant	a=0.5139 nm
Melting point	2500 ℃
Density	6.05 g/cm3(20 ℃)
Dielectric constant	27
Thermal expansion coefficient	10.3×10-6/℃

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Size (Outer size tolerance: ±0.1 mm / Thickness tolerance: ±0.05 mm)	10×10×0.5 t 15×15×0.5 t
Orientation (Tolerance: ±0.5°)	(100), (111)
Polishing	One-side / Both-side
Surface roughness	Ra≦1.0 nm Rmax≦5.0 nm